SLIT COATER

1. Highly uniform coating for liquid PR/liquid PID

2. Suitable for high resolution process

3. Applicable to coating warped panels

4. Coater/Developer confuguration available for mass production inline configuration with Exposure/TMAH developer

1. Suitable for all kinds of coating materials, from nano-level thin films to thick films.
2. Various piping systems are possible, so the desired film thickness and uniformity can be generated.
3. The flexible device configuration responds to various processes, making it optimal for test devices and small-lot production equipment.
4. Allows in-line installations with coater/developer.
5. A two-nozzle version that can use two different coating materials is also available.
6. In addition to coating of the entire surface, stripe coating, intermittent coating and block coating are possible.
7. LC-M550G/750G for semiconductor Package.

1. Asia Fine Tech’s long experience with the technology required for coating systems for display has led to the development of a proprietary coating die with exceptional coating uniformity.
2. Due to its liquid feed method that employs a super-low volume pump, testing with the LC-R300G is possible with as little as 50 cc (15-cc pipe capacity) of coating material.
3. In addition to coating of the entire surface, the LC-R series is also available for stripe coating, intermittent coating, and block coating.
4. Vacuum Dry Chamber and Hot Plate are also available (option).
5. Installation of the LC-R300G in an environmental chamber enables coating tests under an environment in which oxygen, moisture, and other parameters are controlled.